Capability directory

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Lithography capabilities
Lithography equipment suite - Griffith Universityview more details
Mask aligner - Bandwidth Foundry Internationalview more details
Heidelberg Instruments Direct Write Laser 200 - Bandwidth Foundry Internationalview more details
Nikon Optiphot Model 150 Microscope NIL - Bandwidth Foundry Internationalview more details
EVG 620 and 520HE mask aligner (NIL) and hot embosser - Australian National Universityview more details
Mask aligner Suss MA6 - Australian National Universityview more details
E-beam lithography EBL - RAITH 150 - Australian National Universityview more details
E-Beam Evaporator EBL - Australian National Universityview more details