Capability directory

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Lithography capabilities
Raith 150TWO electron beam lithography system EBL - University of New South Walesview more details
FEI Sirion/NPGS electron beam lithography system EBL - University of New South Walesview more details
Karl Suss MA6/BA6 mask aligner - University of New South Walesview more details
Quintel Q6000 mask aligner single chip - University of New South Walesview more details
Quintel Q6000 mask aligner Single wafer - University of New South Walesview more details
Vertical UV lamp - University of Adelaideview more details
Dip Pen Lithography - Swinburne Universityview more details
Ultraviolet Flood light Source - Swinburne Universityview more details
Nano imprint lithography NIL - Royal Melbourne Institute of Technology Universityview more details
Photolithography - Royal Melbourne Institute of Technology Universityview more details
SUSSMicrotec Delta 80RC spinner - Monash Universityview more details
SUSSMicrotec MA6 Aligner - Monash Universityview more details
Analysis workstations w - ANSYS COMSOL Mathematica LinkCAD - Monash Universityview more details
Neutronix Quintel Q4000 6 Ultraviolet Photolithography - Melbourne Universityview more details
Electron Beam Lithography EBL - Melbourne Centre for Nanofabricationview more details
Hot Embossing System - Melbourne Centre for Nanofabricationview more details
Hot Roll Laminator - Melbourne Centre for Nanofabricationview more details
Inkjet printing and spotting - Melbourne Centre for Nanofabricationview more details
Single-Front Side Mask Aligner with Nanoimprint Lithography - UV NIL - Melbourne Centre for Nanofabricationview more details
Ultraviolet flood source - Melbourne Centre for Nanofabricationview more details