Capability directory

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Etching capabilities
Oxygen plasma etcher - Melbourne Centre for Nanofabricationview more details
Reactive Ion Etcher system ICP RIE general - Melbourne Centre for Nanofabricationview more details
Reactive Ion Etcher system 2 ICP - RIE - Melbourne Centre for Nanofabricationview more details
Reactive-ion etching RIE - LaTrobe Universityview more details
Plasma etching equipment LAM 480 - Griffith Universityview more details
Inductively coupled plasma reactive ion etching ICP-RIE - Australian National Universityview more details
Barrel etcher PVA Tepla Gigabatch 310 M - Australian National Universityview more details
Inductively coupled plasma ICP - Australian National Universityview more details