Capability directory

Types of fabrication

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Etching capabilities
Reactive-ion etching (RIE) - CSIRO Lindfieldview more details
Reactive ion etching (RIE) - Australian National Universityview more details
Reactive Ion Etching System RIE - University of Western Australiaview more details
Inductively coupled plasma Reactive-ion etcher ICP RIE - University of Western Australiaview more details
Reactive Ion Etcher RIE - University of Sydneyview more details
Deep reactive ion etcher DRIE - University of South Australiaview more details
Plasma asher - University of South Australiaview more details
Plasma therm deep reactive ion etcher DRIE - University of Queenslandview more details
Prog 200 reactive ion etching system RIE - University of Queenslandview more details
XeF2 etcher - University of Queenslandview more details
STS inductively coupled plasma reactive ion etching ICP RIE - University of New South Walesview more details
Hollow-cathode reactive ion etching system - University of New South Walesview more details
Vacutec reactive ion etching system - University of New South Walesview more details
Denton O2 plasma asher - University of New South Walesview more details
Velocity Doppler system for plasma spraying - Swinburne Universityview more details
Plasma etcher - Royal Melbourne Institute of Technology Universityview more details
Wet etch suite - Monash Universityview more details
Plasma etcher - Monash Universityview more details
Anisotropic Ar plasma etching tool ion miller - Melbourne Centre for Nanofabricationview more details
Reactive Ion Etcher system 2 ICP - RIE - Melbourne Centre for Nanofabricationview more details