Capability directory

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Function

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Deposition capabilities
Labec - MKS Thermal CVD system - Flinders Universityview more details
Vacuum Evaporator - Glovebox - Spin Coater - Flinders Universityview more details
Mantis NanoCluster Source - Flinders Universityview more details
Vacuum oven - CSIRO Lindfieldview more details
Ion beam figuring system - CSIRO Lindfieldview more details
Ion assisted depostion system - CSIRO Lindfieldview more details
Veeco ion beam sputtering system - CSIRO Lindfieldview more details
Metal organic chemical vapour deposition MOCVD - Australian National Universityview more details
Metal organic chemical vapour deposition MOCVD - Australian National Universityview more details
E-beam evaporator - Australian National Universityview more details
Atomic layer deposition - Australian National Universityview more details
Chemical vapour deposition - University of Newcastleview more details
Inorganic thin film coating - University of Wollongongview more details
Molecular Beam Epitaxy facility MBE - University of Western Australiaview more details
Plasma Enhanced Chemical Vapour Deposition Systems PECVD - University of Western Australiaview more details
Inductively coupled plasma chemical vapour deposition ICPCVD - University of Western Australiaview more details
E-beam and thermal evaporators - University of Western Australiaview more details
Sputter coater - University of South Australiaview more details
AJA sputtering system RF/DC - University of Queenslandview more details
Electrochemistry suite - University of Queenslandview more details