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Metal organic chemical vapour deposition MOCVD

Metal Organic Chemical Vapour Deposition (MOCVD), also known as Metal Organic vapour phase epitaxy (MOVPE), is an epitaxial growth technique of materials, especially compound semiconductors, from the surface reaction of organic compounds or metalorganics and metal hydrides containing the required chemical elements.

Fabrication step: Micro and nano fabrication
Function: Deposition
Location: Australian National University
Purpose: Epitaxial growth
Material systems: III-V semiconductors (As-, P- and Sb-based materials)
Node: Australian Capital Territory
Scale/volume: 3 x 2 inch, 1 x 3 inch or 1 x 4 inch substrate
Specifications/resolution: bulk layers, quantum wells, quantum dots, nanowires and device structures