Capability directory

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Micro and nano fabrication capabilities
Dektak 2A profilometer - University of New South Walesview more details
Lesker Thermal Evaporator - University of New South Walesview more details
Dektak 3030 profilometer - University of New South Walesview more details
Edwards thermal evaporator - University of New South Walesview more details
Dektak 150 profilometer - University of New South Walesview more details
HHV sputtering system - University of New South Walesview more details
Edwards sputtering system - University of New South Walesview more details
Raith 150TWO electron beam lithography system EBL - University of New South Walesview more details
CNT Savannah S200 atomic layer deposition system ALD - University of New South Walesview more details
FEI Sirion/NPGS electron beam lithography system EBL - University of New South Walesview more details
Vacutec Plasma Enhanced Chemical Vapour Deposition System - University of New South Walesview more details
Karl Suss MA6/BA6 mask aligner - University of New South Walesview more details
Oxidation Furnace - Dry Oxidation - University of New South Walesview more details
Quintel Q6000 mask aligner single chip - University of New South Walesview more details
Oxidation Furnace - General Purpose - University of New South Walesview more details
Quintel Q6000 mask aligner Single wafer - University of New South Walesview more details
Diffusion Furnace - Boron - University of New South Walesview more details
Suite of resist processing tools (spinners and hotplates) - University of New South Walesview more details
Diffusion Furnace - Phosphorus - University of New South Walesview more details
Vertical UV lamp - University of Adelaideview more details