Capability directory

Types of fabrication

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Micro and nano fabrication capabilities
Electrochemistry suite - University of Queenslandview more details
HMDS hexamethyldisilzane oven - University of Queenslandview more details
Glove box with integrated vacuum evaporators - University of Queenslandview more details
Litrex 70 inkjet printer - University of Queenslandview more details
ICP enhanced chemical vapour deposition ICPECVD - University of Western Australiaview more details
Plasma therm deep reactive ion etcher DRIE - University of Queenslandview more details
Prog 200 reactive ion etching system RIE - University of Queenslandview more details
AJA sputtering system RF/DC - University of Queenslandview more details
Wet bench - University of Queenslandview more details
Quintel Q6000 mask aligner single chip - University of New South Walesview more details
Oxidation Furnace - General Purpose - University of New South Walesview more details
Quintel Q6000 mask aligner Single wafer - University of New South Walesview more details
Diffusion Furnace - Boron - University of New South Walesview more details
Suite of resist processing tools (spinners and hotplates) - University of New South Walesview more details
Diffusion Furnace - Phosphorus - University of New South Walesview more details
STS inductively coupled plasma reactive ion etching ICP RIE - University of New South Walesview more details
Anneal Furnace - General Purpose - University of New South Walesview more details
Hollow-cathode reactive ion etching system - University of New South Walesview more details
Anneal Furnace - Clean Anneal - University of New South Walesview more details
Vacutec reactive ion etching system - University of New South Walesview more details