Capability directory

Types of fabrication

Function

Location

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Micro and nano fabrication capabilities
Nanoscribe Photonic Professional GT - University of Queenslandview more details
Cleaning and wet etching - CSIRO Lindfieldview more details
Surface profilometer - CSIRO Lindfieldview more details
Sputter coaters - CSIRO Lindfieldview more details
Ion beam etcher - CSIRO Lindfieldview more details
Hot plate - CSIRO Lindfieldview more details
Mask aligner - CSIRO Lindfieldview more details
Spinners - CSIRO Lindfieldview more details
Vacuum oven and digital hotplates - CSIRO Lindfieldview more details
Reactive-ion etching (RIE) - CSIRO Lindfieldview more details
Vacuum oven - CSIRO Lindfieldview more details
Ozone cleaner - CSIRO Lindfieldview more details
Ion beam figuring system - CSIRO Lindfieldview more details
Ion assisted depostion system - CSIRO Lindfieldview more details
Veeco ion beam sputtering system - CSIRO Lindfieldview more details
Ozone cleaner - Melbourne Centre for Nanofabricationview more details
Vacuum furnace - Red Devil - RD Webb - University of South Australiaview more details
Thermal annealing systems - Australian National Universityview more details
Metal organic chemical vapour deposition MOCVD - Australian National Universityview more details
Metal organic chemical vapour deposition MOCVD - Australian National Universityview more details