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Spatial light modulator SLM

Spatial light modulator SLM

Fabrication step: Micro and nano fabrication
Function: Lithography
Location: University of Western Australia
Purpose: LBIC diode/material opto-electic characterisation
Material systems: H-Cd-Te
Node: Western Australia
Scale/volume: up to 1 inch wafers
Specifications/resolution: current sensitivity pA