Capability directory

Types of fabrication

Function

Location

Or use capability keyword(s)

Spectroscopic Ellipsometer

The Spectroscopic Ellipsometer is from JA Woollam. Ellipsometery is an optical characterisation method that is used to identify optical properties of thin films such as refractive index, dielectric constant, film thickness etc.

The model being purchased is an M2000 D+I system with options for mapping across a substrate surface, in situ measurements on Atomic Layer System, focus probes for analysis of <300um spots and liquid cell.

The system will be key in the development of MCNs vast array of thin film techniques.

Fabrication step: Characterisation
Function: Surface - thin films
Location: Melbourne Centre for Nanofabrication
Purpose: Materials Characterisation
Material systems: All materials
Node: Victoria