Capability directory

Types of fabrication



Or use capability keyword(s)

Benchtop scanning electron microscope SEM

Jeol NeoScope Table Bench Top SEM Scanning Electron Microscope gives you the power of scanning electron microscopy in a convenient, compact package.

View samples and capture images at a magnification range of 10X to 40,000X without the need to adjust or change lenses. Improve your analysis and imaging with higher resolution, greater depth of field, longer working distances and better surface sensitivity.

The NeoScope offers high-vacuum and low-vacuum modes, secondary electron and backscattered electron imaging and three selectable accelerating voltages. This allows the user to inspect and image a wide range of samples, capture clear high-resolution images of defects, foreign materials, surface structures, artifacts, biological tissues and forensic evidence.

Fabrication step: Characterisation
Function: Microscopy
Location: University of Queensland
Purpose: Metrology tool to allow process development during the etching and other fabrication processes using high magnification and resolution images
Material systems: Any
Node: Queensland
Scale/volume: Single and/or multiple sample/system
Specifications/resolution: Magnification X10 20K, sample size 70 mm diameter acceleration and voltage of 15KV, 10KV and 5KV