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Contactless cross section polisher - JEOL

Contactless cross section polisher (JEOL)

Fabrication step: Characterisation
Function: Microscopy
Location: Macquarie University
Purpose: For non contact cross sectioning of miniature and fragile components.
Material systems: Metals polymers glasses crystals ceramics and biological specimens
Node: OptoFab
Scale/volume: Sample size 10x10x5mm. Processing area 1x0.5 mm
Specifications/resolution: End facet polishing to < lambda micron surface roughness. Less than 100nm deformation for soft samples.