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JA Woollam spectroscopic ellipsometer

JA Woollam spectroscopic ellipsometer

Fabrication step: Characterisation
Function: Surface - thin films
Location: University of New South Wales
Purpose: optical device characterisation
Material systems: Most hard materials
Node: New South Wales
Scale/volume: Single wafer up to 300mm diameter
Specifications/resolution: 210nm to1000nm (485 wavelengths); WVase software