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Stylus profilometer

The Alphastep 500 is a stylus-based surface profiler to measure step heights of surfaces. A stylus is placed in contact with, and then gently dragged along the surface of the substrate.

The vertical deflection measures the change in step height, from which we can determine film thickness. It can also be used to measure surface roughness, and the horizontal dimensions of microstructures.

Fabrication step: Characterisation
Function: Surface - thin films
Location: University of Newcastle
Purpose: Measurement of thin film thickness
Material systems: Polymers, organics, dielectrics, metals, semiconductors, glasses and ceramics
Node: Materials
Scale/volume: Up to 4inch wafer
Specifications/resolution: 10 nm z-resolution