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Optical profiler Veeco NT9100

This system allows contactless step height (topographical) measurements. Also through wafer bow measurements wafer stress can be determined.

Fabrication step: Characterisation
Function: Surface - thin films
Location: Australian National University
Purpose: Step height and bowing
Material systems: Various
Node: Australian Capital Territory
Scale/volume: 6 inch
Specifications/resolution: Vertical accuracy of <1 nm