Capability directory

Types of fabrication



Or use capability keyword(s)

Denton desk V SEM sputter

To ease SEM inspection of non-conductive materials 2 nm of conductive layer is required to avoid electrons charging in the SEM column. Typically 2 nm of Au/Pd or Au is sputtered with this system prior to SEM analysis.

The system allows sputtering under a tilted angle and rotation.

Fabrication step: Characterisation
Function: Microscopy
Location: Australian National University
Purpose: Deposit 2nm conductive layer on samples for SEM
Material systems: Pd-Au; Au; Ag
Node: Australian Capital Territory
Scale/volume: Pieces up to 30mm Ø
Specifications/resolution: Sample Rotation